H105

Key features:

  • Suitable for most major brand microscopes.
  • 1µm or better repeatability
  • Quiet and reliable
  • Wide range of sample holders
  • Optional 100nm linear scales provide the highest precision available

The H105 is especially well-suited for applications that typically involve large specimens. For example, for performing scanning of a wide range of semiconductor wafers, photo masks, and printed circuit boards. The H105 can easily accommodate 6" wafers. H105 stage are fully mapped for improved metric accuracy.

  um um mm/s mm kg mm SPR ** um res
  Uni-Directional
Repeatability *
Min Step
Size
Recomended
speed
Max Travel
Range
Weight Ball Screw
Pitch
Motor
Type
Encoders
H105/2 ## +/- 0.7 0.04 24 154 x 154 5 2 200 No
HE05/2 ## +/- 0.7 0.04 24 154 x 154 5 2 200 0.1

 

Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanTM controllers with backlash correction enabled, all repeatability is Uni-directional.
**S.P.R: Full steps per revolution of motor.